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High-Efficiency Doping Outcomes in Homoepitaxial β‑Ga2O3 Films via Pulsed Si Doping with MOCVD.

Authors :
Wang, Yao
Feng, Qian
Wu, Wenkai
Liu, Yuhong
Zhang, Yachao
Zhang, Jincheng
Hao, Yue
Source :
Crystal Growth & Design; 10/2/2024, Vol. 24 Issue 19, p8101-8111, 11p
Publication Year :
2024

Details

Language :
English
ISSN :
15287483
Volume :
24
Issue :
19
Database :
Supplemental Index
Journal :
Crystal Growth & Design
Publication Type :
Academic Journal
Accession number :
180093280
Full Text :
https://doi.org/10.1021/acs.cgd.4c01049