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Stress-Dependent Optical Extinction in Low-Pressure Chemical Vapor Deposition Silicon Nitride Measured by Nanomechanical Photothermal Sensing.
- Source :
- Nano Letters; 9/11/2024, Vol. 24 Issue 36, p11262-11268, 7p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 15306984
- Volume :
- 24
- Issue :
- 36
- Database :
- Supplemental Index
- Journal :
- Nano Letters
- Publication Type :
- Academic Journal
- Accession number :
- 179606222
- Full Text :
- https://doi.org/10.1021/acs.nanolett.4c02902