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Stress-Dependent Optical Extinction in Low-Pressure Chemical Vapor Deposition Silicon Nitride Measured by Nanomechanical Photothermal Sensing.

Authors :
Kanellopulos, Kostas
West, Robert G.
Emminger, Stefan
Martini, Paolo
Sauer, Markus
Foelske, Annette
Schmid, Silvan
Source :
Nano Letters; 9/11/2024, Vol. 24 Issue 36, p11262-11268, 7p
Publication Year :
2024

Details

Language :
English
ISSN :
15306984
Volume :
24
Issue :
36
Database :
Supplemental Index
Journal :
Nano Letters
Publication Type :
Academic Journal
Accession number :
179606222
Full Text :
https://doi.org/10.1021/acs.nanolett.4c02902