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Intrinsic Thermomechanical Properties of Freestanding TEOS-SiO2 Thin Films Depending on Thickness.

Authors :
Kim, HyeongJun
Kim, Dong Jun
Kim, Joon Pyo
Baek, Woo Jin
Kim, Sang Hyeon
Kim, Taek-Soo
Source :
ACS Applied Electronic Materials; 7/23/2024, Vol. 6 Issue 7, p5293-5300, 8p
Publication Year :
2024

Details

Language :
English
ISSN :
26376113
Volume :
6
Issue :
7
Database :
Supplemental Index
Journal :
ACS Applied Electronic Materials
Publication Type :
Academic Journal
Accession number :
178866741
Full Text :
https://doi.org/10.1021/acsaelm.4c00844