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Intrinsic Thermomechanical Properties of Freestanding TEOS-SiO2 Thin Films Depending on Thickness.
- Source :
- ACS Applied Electronic Materials; 7/23/2024, Vol. 6 Issue 7, p5293-5300, 8p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 26376113
- Volume :
- 6
- Issue :
- 7
- Database :
- Supplemental Index
- Journal :
- ACS Applied Electronic Materials
- Publication Type :
- Academic Journal
- Accession number :
- 178866741
- Full Text :
- https://doi.org/10.1021/acsaelm.4c00844