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Control of Presentation of Functional Ultraviolet Absorbers to the Surface of Photoresist Polymers Using Low Surface Energy Polymers.

Authors :
Du, Ke
Siauw, Meiliana
Valade, David
Jasieniak, Marek
Voelcker, Nicolas H.
Trefonas III, Peter
Thackeray, James W.
Peng, Hui
Blakey, Idriss
Whittaker, Andrew K.
Source :
Chemistry of Materials; 5/28/2024, Vol. 36 Issue 10, p5264-5276, 13p
Publication Year :
2024

Details

Language :
English
ISSN :
08974756
Volume :
36
Issue :
10
Database :
Supplemental Index
Journal :
Chemistry of Materials
Publication Type :
Academic Journal
Accession number :
177533497
Full Text :
https://doi.org/10.1021/acs.chemmater.4c00791