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Quantification of Crystalline Phases in Hf0.5Zr0.5O2 Thin Films through Complementary Infrared Spectroscopy and Ab Initio Supercell Simulations.

Details

Language :
English
ISSN :
19448244
Volume :
16
Issue :
3
Database :
Supplemental Index
Journal :
ACS Applied Materials & Interfaces
Publication Type :
Academic Journal
Accession number :
175028529
Full Text :
https://doi.org/10.1021/acsami.3c13848