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Atomic Layer Deposition as the Enabler for the Metastable Semiconductor InN and Its Alloys.

Authors :
Pedersen, Henrik
Hsu, Chih-Wei
Nepal, Neeraj
Woodward, Jeffrey M.
Eddy Jr, Charles R.
Source :
Crystal Growth & Design; 10/4/2023, Vol. 23 Issue 10, p7010-7025, 16p
Publication Year :
2023

Details

Language :
English
ISSN :
15287483
Volume :
23
Issue :
10
Database :
Supplemental Index
Journal :
Crystal Growth & Design
Publication Type :
Academic Journal
Accession number :
172824261
Full Text :
https://doi.org/10.1021/acs.cgd.3c00775