Back to Search Start Over

Selective Crystallization of Ferroelectric HfxZr1–xO2 via Excimer Laser Annealing.

Authors :
Song, Myeong Seop
Park, Kunwoo
Lee, Kyoungjun
Cho, Jung Woo
Lee, Tae Yoon
Park, Jungwon
Chae, Seung Chul
Source :
ACS Applied Electronic Materials; 1/24/2023, Vol. 5 Issue 1, p117-122, 6p
Publication Year :
2023

Details

Language :
English
ISSN :
26376113
Volume :
5
Issue :
1
Database :
Supplemental Index
Journal :
ACS Applied Electronic Materials
Publication Type :
Academic Journal
Accession number :
161513867
Full Text :
https://doi.org/10.1021/acsaelm.2c01555