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Accelerated Deep Learning Dynamics for Atomic Layer Deposition of Al(Me)3 and Water on OH/Si(111).
- Source :
- ACS Applied Materials & Interfaces; 6/8/2022, Vol. 14 Issue 22, p26116-26127, 12p
- Publication Year :
- 2022
Details
- Language :
- English
- ISSN :
- 19448244
- Volume :
- 14
- Issue :
- 22
- Database :
- Supplemental Index
- Journal :
- ACS Applied Materials & Interfaces
- Publication Type :
- Academic Journal
- Accession number :
- 157359306
- Full Text :
- https://doi.org/10.1021/acsami.2c01768