Back to Search Start Over

Accelerated Deep Learning Dynamics for Atomic Layer Deposition of Al(Me)3 and Water on OH/Si(111).

Authors :
Nakata, Hiroya
Filatov, Michael
Choi, Cheol Ho
Source :
ACS Applied Materials & Interfaces; 6/8/2022, Vol. 14 Issue 22, p26116-26127, 12p
Publication Year :
2022

Details

Language :
English
ISSN :
19448244
Volume :
14
Issue :
22
Database :
Supplemental Index
Journal :
ACS Applied Materials & Interfaces
Publication Type :
Academic Journal
Accession number :
157359306
Full Text :
https://doi.org/10.1021/acsami.2c01768