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Geometric Tuning of Stress in Predisplaced Silicon Nitride Resonators.
- Source :
- Nano Letters; 5/25/2022, Vol. 22 Issue 10, p4013-4019, 7p
- Publication Year :
- 2022
Details
- Language :
- English
- ISSN :
- 15306984
- Volume :
- 22
- Issue :
- 10
- Database :
- Supplemental Index
- Journal :
- Nano Letters
- Publication Type :
- Academic Journal
- Accession number :
- 157097746
- Full Text :
- https://doi.org/10.1021/acs.nanolett.2c00613