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Effective Suppression of MIS Interface Defects Using Boron Nitride toward High-Performance Ta-Doped-β-Ga2O3 MISFETs.

Authors :
Li, Xiao-Xi
Sun, Yu
Zeng, Guang
Li, Yu-Chun
Zhang, Rui
Sai, Qing-Lin
Xia, Chang-Tai
Zhang, David Wei
Yang, Ying-Guo
Lu, Hong-Liang
Source :
Journal of Physical Chemistry Letters; 4/21/2022, Vol. 13 Issue 15, p3377-3381, 5p
Publication Year :
2022

Details

Language :
English
ISSN :
19487185
Volume :
13
Issue :
15
Database :
Supplemental Index
Journal :
Journal of Physical Chemistry Letters
Publication Type :
Academic Journal
Accession number :
156491771
Full Text :
https://doi.org/10.1021/acs.jpclett.2c00722