Real-Time In Situ Parallel Detection of Elements and Molecules with TOFMS during ALD for Chemical Quality Control of Thin Films.

Details

Language :

English

ISSN :

19327447

Volume :

126

Issue :

4

Database :

Supplemental Index

Journal :

Journal of Physical Chemistry C

Publication Type :

Academic Journal

Accession number :

156464100

Full Text :

https://doi.org/10.1021/acs.jpcc.1c09544