Bayesian Machine Learning for Efficient Minimization of Defects in ALD Passivation Layers.

MLA

Dogan, Gül, et al. “Bayesian Machine Learning for Efficient Minimization of Defects in ALD Passivation Layers.” ACS Applied Materials & Interfaces, vol. 13, no. 45, Nov. 2021, pp. 54503–15. EBSCOhost, https://doi.org/10.1021/acsami.1c14586.

APA

Dogan, G., Demir, S. O., Gutzler, R., Gruhn, H., Dayan, C. B., Sanli, U. T., Silber, C., Culha, U., Sitti, M., Schütz, G., Grévent, C., & Keskinbora, K. (2021). Bayesian Machine Learning for Efficient Minimization of Defects in ALD Passivation Layers. ACS Applied Materials & Interfaces, 13(45), 54503–54515. https://doi.org/10.1021/acsami.1c14586

Chicago

Dogan, Gül, Sinan O. Demir, Rico Gutzler, Herbert Gruhn, Cem B. Dayan, Umut T. Sanli, Christian Silber, et al. 2021. “Bayesian Machine Learning for Efficient Minimization of Defects in ALD Passivation Layers.” ACS Applied Materials & Interfaces 13 (45): 54503–15. doi:10.1021/acsami.1c14586.