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Achieving a Record-High Capacitive Energy Density on Si with Columnar Nanograined Ferroelectric Films.
- Source :
- ACS Applied Materials & Interfaces; 2/16/2022, Vol. 14 Issue 6, p7805-7813, 9p
- Publication Year :
- 2022
Details
- Language :
- English
- ISSN :
- 19448244
- Volume :
- 14
- Issue :
- 6
- Database :
- Supplemental Index
- Journal :
- ACS Applied Materials & Interfaces
- Publication Type :
- Academic Journal
- Accession number :
- 155908723
- Full Text :
- https://doi.org/10.1021/acsami.1c19197