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Conformal 3D Nanopatterning by Block Copolymer Lithography with Vapor-Phase Deposited Neutral Adlayer.
- Source :
- ACS Nano; 11/26/2019, Vol. 13 Issue 11, p13092-13099, 8p
- Publication Year :
- 2019
Details
- Language :
- English
- ISSN :
- 19360851
- Volume :
- 13
- Issue :
- 11
- Database :
- Supplemental Index
- Journal :
- ACS Nano
- Publication Type :
- Academic Journal
- Accession number :
- 145007093
- Full Text :
- https://doi.org/10.1021/acsnano.9b05859