Some Insights into Atomic Layer Deposition of MoNx Using Mo(CO)6 and NH3 and Its Diffusion Barrier Application.

Details

Language :

English

ISSN :

08974756

Volume :

31

Issue :

20

Database :

Supplemental Index

Journal :

Chemistry of Materials

Publication Type :

Academic Journal

Accession number :

144957222

Full Text :

https://doi.org/10.1021/acs.chemmater.9b01578