In Situ X-ray Diffraction and Spectro-Microscopic Study of ALD Protected Copper Films.

Details

Language :

English

ISSN :

19448244

Volume :

12

Issue :

29

Database :

Supplemental Index

Journal :

ACS Applied Materials & Interfaces

Publication Type :

Academic Journal

Accession number :

144866414

Full Text :

https://doi.org/10.1021/acsami.0c06873