Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition.

Details

Language :

English

ISSN :

19448244

Volume :

11

Issue :

9

Database :

Supplemental Index

Journal :

ACS Applied Materials & Interfaces

Publication Type :

Academic Journal

Accession number :

144850163

Full Text :

https://doi.org/10.1021/acsami.8b21054