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Fabrication of Sub-3 nm Feature Size Based on Block Copolymer Self-Assembly for Next-Generation Nanolithography.
- Source :
- Macromolecules; Sep2017, Vol. 50 Issue 17, p6813-6818, 6p
- Publication Year :
- 2017
Details
- Language :
- English
- ISSN :
- 00249297
- Volume :
- 50
- Issue :
- 17
- Database :
- Supplemental Index
- Journal :
- Macromolecules
- Publication Type :
- Academic Journal
- Accession number :
- 126047038
- Full Text :
- https://doi.org/10.1021/acs.macromol.7b00945