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Lateral Ge Diffusion During Oxidation of Si/SiGe Fins.

Authors :
Brewer, William M.
Yan Xin
Hatem, C.
Diercks, D.
Truong, V. Q.
Jones, K. S.
Source :
Nano Letters; Apr2017, Vol. 17 Issue 4, p2159-2164, 6p
Publication Year :
2017

Details

Language :
English
ISSN :
15306984
Volume :
17
Issue :
4
Database :
Supplemental Index
Journal :
Nano Letters
Publication Type :
Academic Journal
Accession number :
122550917
Full Text :
https://doi.org/10.1021/acs.nanolett.6b04407