Fabrication of Gold Split-ring Resonator Arrays by Surface-assisted Ultraviolet Nanoimprint Lithography Using Hydroxy-terminated Alkanethiol Monolayers.

Dewetting behaviors of sub-50-nm-thick ultraviolet-curable resin films comprising hydroxy-containing (meth)acrylate monomers on modified Au-plated substrates were investigated by fluorescence microscopy. Hydroxy-terminated alkanethiol-adsorbed monolayers on Au surfaces suppressed dewetting of the thin spin-coated films and allowed the fabrication of 50-nm-line-width Au split-ring resonator (SRR) arrays by ultraviolet nanoimprint lithography. [ABSTRACT FROM AUTHOR]