Highly sensitive lateral deformable optical MEMS displacement sensor: anomalous diffraction studied by rigorous coupled-wave analysis.

Details

Language :

English

ISSN :

1559128X

Volume :

54

Issue :

30

Database :

Supplemental Index

Journal :

Applied Optics (1559-128X)

Publication Type :

Academic Journal

Accession number :

110610722

Full Text :

https://doi.org/10.1364/AO.54.008935