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Highly sensitive lateral deformable optical MEMS displacement sensor: anomalous diffraction studied by rigorous coupled-wave analysis.
- Source :
- Applied Optics (1559-128X); 10/20/2015, Vol. 54 Issue 30, p8935-8943, 9p
- Publication Year :
- 2015
Details
- Language :
- English
- ISSN :
- 1559128X
- Volume :
- 54
- Issue :
- 30
- Database :
- Supplemental Index
- Journal :
- Applied Optics (1559-128X)
- Publication Type :
- Academic Journal
- Accession number :
- 110610722
- Full Text :
- https://doi.org/10.1364/AO.54.008935