Parallel Arrays of Sub-10 nm Aligned Germanium Nanofinsfrom an In Situ Metal Oxide Hardmask using Directed Self-Assemblyof Block Copolymers.

Details

Language :

English

ISSN :

08974756

Volume :

27

Issue :

17

Database :

Supplemental Index

Journal :

Chemistry of Materials

Publication Type :

Academic Journal

Accession number :

109340628

Full Text :

https://doi.org/10.1021/acs.chemmater.5b02608