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Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation.
- Source :
- Applied Optics (1559-128X); 5/1/2015, Vol. 54 Issue 13, p4188-4196, 9p
- Publication Year :
- 2015
Details
- Language :
- English
- ISSN :
- 1559128X
- Volume :
- 54
- Issue :
- 13
- Database :
- Supplemental Index
- Journal :
- Applied Optics (1559-128X)
- Publication Type :
- Academic Journal
- Accession number :
- 103182763
- Full Text :
- https://doi.org/10.1364/AO.54.004188