Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation.

Details

Language :

English

ISSN :

1559128X

Volume :

54

Issue :

13

Database :

Supplemental Index

Journal :

Applied Optics (1559-128X)

Publication Type :

Academic Journal

Accession number :

103182763

Full Text :

https://doi.org/10.1364/AO.54.004188