Screen Printed Free-standing Resonator with Piezoelectric Excitation and Detection on Flexible Substrate.

This paper reports the design, fabrication and testing of a free-standing encastre beam resonator which is entirely fabricated using screen printing onto a flexible polyimide substrate. The fabrication of the free-standing resonator was achieved using sacrificial techniques. The resonator was designed to be excited at one end of the beam and the vibrations detected on the other end using piezoelectric material. The resonator was 11 mm long and 4 mm wide with an air gap of 119 μm, created by selectively removing the sacrificial layer. The device resonates in air with maximum generated voltage of 0.1545 volt at fundamental frequency of 3.834 kHz. [ABSTRACT FROM AUTHOR]