Processes at Multi-pulse Laser Embossing of Submicron Surface Structures.

Three-dimensional micro- and nanostructuring of metal surfaces is requested due to the ongoing miniaturization and is therefore of great interest for microelectromechanical systems (MEMS), micro- optics, and precision machining. One promising fabrication method for low-cost, high-quality micro- and nanostructured metal surfaces is laser microembossing. Recent experimental results of laser embossing of submicron structures are presented to discuss the processes and characteristics of laser micro-embossing. Basically, laser embossing shows almost no modification caused by thermal effects of the laser pulses. Therefore, almost no burr, recast droplets, or near-surface material modifications have been found at the embossed structures. The elastoplastic deformation at incomplete submicron pattern embossing is probably the reason for the differences between the replicated pattern and the master structures. Unintended patterns like scratches and satellite patterns may occur in the case of multi-pulse laser embossing without carefully fixing the sample and master positions. [ABSTRACT FROM AUTHOR]