Gas sensing properties of very thin TiO2 films prepared by atomic layer deposition (ALD).

Details

Language :

English

ISSN :

17426588

Volume :

559

Issue :

1

Database :

Complementary Index

Journal :

Journal of Physics: Conference Series

Publication Type :

Academic Journal

Accession number :

99696019

Full Text :

https://doi.org/10.1088/1742-6596/559/1/012013