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Warpage and stress optimization of wafer-level package of MEMS with glass frit bonding.

Authors :
Xu, Gaowei
Zhu, Chunsheng
Ye, Jiaotuo
Li, Heng
Gai, Wei
Luo, Le
Source :
2014 15th International Conference on Electronic Packaging Technology; 2014, p1075-1079, 5p
Publication Year :
2014

Details

Language :
English
ISBNs :
9781479947072
Database :
Complementary Index
Journal :
2014 15th International Conference on Electronic Packaging Technology
Publication Type :
Conference
Accession number :
99488355
Full Text :
https://doi.org/10.1109/ICEPT.2014.6922832