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A new designed trench structure to reduce the wafer warpage in wafer level packaging process.

Authors :
Zhu, Chunsheng
Lee, Heng
Ye, Jiaotuo
Xu, Gaowei
Luo, Le
Source :
2014 15th International Conference on Electronic Packaging Technology; 2014, p606-609, 4p
Publication Year :
2014

Details

Language :
English
ISBNs :
9781479947072
Database :
Complementary Index
Journal :
2014 15th International Conference on Electronic Packaging Technology
Publication Type :
Conference
Accession number :
99488252
Full Text :
https://doi.org/10.1109/ICEPT.2014.6922729