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SIMEIT-project: High precision inertial sensor integration on a modular 3D-Interposer platform.

Authors :
Steller, Wolfram
Meinecke, Christoph
Gottfried, Knut
Woldt, Gregor
Gunther, Wolfgang
Wolf, M. Juergen
Dieter Lang, K.
Source :
2014 IEEE 64th Electronic Components & Technology Conference (ECTC); 2014, p1218-1225, 8p
Publication Year :
2014

Details

Language :
English
ISBNs :
9781479924073
Database :
Complementary Index
Journal :
2014 IEEE 64th Electronic Components & Technology Conference (ECTC)
Publication Type :
Conference
Accession number :
98878728
Full Text :
https://doi.org/10.1109/ECTC.2014.6897446