Study of central supply methodology for silica-based CMP slurry.

Authors :: Chang, CN
Lien, SS
Hsiao, HC
Tsai, KT
Yu, JP
Source :: 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014); 2014, p299-305, 7p
Publication Year :: 2014

Language :: English
ISBNs :: 9781479939442
Database :: Complementary Index
Journal :: 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014)
Publication Type :: Conference
Accession number :: 98464775
Full Text :: https://doi.org/10.1109/ASMC.2014.6847025