Construction of Larger Area Density-Uniform Plasma with Collisional Inductively Coupled Plasma Cells.

Details

Language :

English

ISSN :

10090630

Volume :

9

Issue :

3

Database :

Complementary Index

Journal :

Plasma Science & Technology

Publication Type :

Academic Journal

Accession number :

98315722

Full Text :

https://doi.org/10.1088/1009-0630/9/3/03