Effect of chemical surface treatment on p-layer formation in the interface region of directly bonded Si wafers.

Details

Language :

English

ISSN :

02681242

Volume :

8

Issue :

9

Database :

Complementary Index

Journal :

Semiconductor Science & Technology

Publication Type :

Academic Journal

Accession number :

98046008

Full Text :

https://doi.org/10.1088/0268-1242/8/9/004