Model and measurements for a planar inductive oxygen discharge.

Details

Language :

English

ISSN :

09630252

Volume :

7

Issue :

1

Database :

Complementary Index

Journal :

Plasma Sources Science & Technology

Publication Type :

Academic Journal

Accession number :

98043911

Full Text :

https://doi.org/10.1088/0963-0252/7/1/002