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Resistive pressure sensing structures on polyimide membranes on GaAs substrate.
- Source :
- Journal of Micromechanics & Microengineering; Jun2000, Vol. 10 Issue 2, p1-1, 1p
- Publication Year :
- 2000
Details
- Language :
- English
- ISSN :
- 13616439
- Volume :
- 10
- Issue :
- 2
- Database :
- Complementary Index
- Journal :
- Journal of Micromechanics & Microengineering
- Publication Type :
- Academic Journal
- Accession number :
- 98012876
- Full Text :
- https://doi.org/10.1088/0960-1317/10/2/320