Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering.

MLA

Hans, M., et al. “Effect of Oxygen Incorporation on the Structure and Elasticity of Ti-Al-O-N Coatings Synthesized by Cathodic Arc and High Power Pulsed Magnetron Sputtering.” Journal of Applied Physics, vol. 116, no. 9, Sept. 2014, pp. 1–6. EBSCOhost, https://doi.org/10.1063/1.4894776.

APA

Hans, M., to Baben, M., Music, D., Ebenhöch, J., Primetzhofer, D., Kurapov, D., Arndt, M., Rudigier, H., & Schneider, J. M. (2014). Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering. Journal of Applied Physics, 116(9), 1–6. https://doi.org/10.1063/1.4894776

Chicago

Hans, M., M. to Baben, D. Music, J. Ebenhöch, D. Primetzhofer, D. Kurapov, M. Arndt, H. Rudigier, and J. M. Schneider. 2014. “Effect of Oxygen Incorporation on the Structure and Elasticity of Ti-Al-O-N Coatings Synthesized by Cathodic Arc and High Power Pulsed Magnetron Sputtering.” Journal of Applied Physics 116 (9): 1–6. doi:10.1063/1.4894776.