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A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals.
- Source :
- Journal of Micromechanics & Microengineering; Dec2006, Vol. 16 Issue 12, p1-1, 1p
- Publication Year :
- 2006
Details
- Language :
- English
- ISSN :
- 13616439
- Volume :
- 16
- Issue :
- 12
- Database :
- Complementary Index
- Journal :
- Journal of Micromechanics & Microengineering
- Publication Type :
- Academic Journal
- Accession number :
- 98005379
- Full Text :
- https://doi.org/10.1088/0960-1317/16/12/004