A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals.

Details

Language :

English

ISSN :

13616439

Volume :

16

Issue :

12

Database :

Complementary Index

Journal :

Journal of Micromechanics & Microengineering

Publication Type :

Academic Journal

Accession number :

98005379

Full Text :

https://doi.org/10.1088/0960-1317/16/12/004