Silicon micromachined high-shock accelerometers with a curved-surface-application structure for over-range stop protection and free-mode-resonance depression.

Details

Language :

English

ISSN :

13616439

Volume :

12

Issue :

6

Database :

Complementary Index

Journal :

Journal of Micromechanics & Microengineering

Publication Type :

Academic Journal

Accession number :

98005203

Full Text :

https://doi.org/10.1088/0960-1317/12/6/304