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Silicon micromachined high-shock accelerometers with a curved-surface-application structure for over-range stop protection and free-mode-resonance depression.
- Source :
- Journal of Micromechanics & Microengineering; Nov2002, Vol. 12 Issue 6, p1-1, 1p
- Publication Year :
- 2002
Details
- Language :
- English
- ISSN :
- 13616439
- Volume :
- 12
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Journal of Micromechanics & Microengineering
- Publication Type :
- Academic Journal
- Accession number :
- 98005203
- Full Text :
- https://doi.org/10.1088/0960-1317/12/6/304