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Thermal Desorption Studies of Ar+ Implanted Silicon.
- Source :
- Acta Physica Polonica: A; Jun2014, Vol. 125 Issue 6, p1400-1403, 4p
- Publication Year :
- 2014
-
Abstract
- Thermal desorption spectrometry measurements were performed for Ar implanted Si samples. Implantation energy E\ varied in the range 85-175 keV. The release of implanted Ar in two steps was observed in the temperature range 930-1300 K: the relatively narrow peak at lower temperature (≈ 930 K for implantation fluence 5 × 10<superscript>16</superscript> cm<superscript>-2</superscript>) is due to the release of Ar from the agglomerations (bubbles) while the broader peak observed for higher temperatures (≈ 950 K for implantation fluence 5 × 10<superscript>16</superscript> cm<superscript>2</superscript>) comes from Ar atoms diffusing out of the sample. Inverse order of peaks is observed compared to the results for lower energy implantations (< 50 keV). Analyzing the thermal desorption spectra collected for different heating ramp rates enabled estimation of the desorption activation energy (2 eV for E<subscript>i</subscript> = 85 keV and 1.7 eV for E<subscript>i</subscript> = 115 keV). [ABSTRACT FROM AUTHOR]
- Subjects :
- THERMAL desorption
SILICON
SPECTRUM analysis
AGGLOMERATION (Materials)
COAGULATION
Subjects
Details
- Language :
- English
- ISSN :
- 05874246
- Volume :
- 125
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Acta Physica Polonica: A
- Publication Type :
- Academic Journal
- Accession number :
- 97917888
- Full Text :
- https://doi.org/10.12693/APhysPolA.125.1400