Improvements of phase-modulated ellipsometry.

MLA

Acher, O., et al. “Improvements of Phase-Modulated Ellipsometry.” Review of Scientific Instruments, vol. 60, no. 1, Jan. 1989, p. 65. EBSCOhost, https://doi.org/10.1063/1.1140580.

APA

Acher, O., Bigan, E., & Drévillon, B. (1989). Improvements of phase-modulated ellipsometry. Review of Scientific Instruments, 60(1), 65. https://doi.org/10.1063/1.1140580

Chicago

Acher, O., E. Bigan, and B. Drévillon. 1989. “Improvements of Phase-Modulated Ellipsometry.” Review of Scientific Instruments 60 (1): 65. doi:10.1063/1.1140580.