Thermal budget impact on HKMG Al2O3 and La gate stacks for advanced DRAM periphery transistors.

Details

Language :

English

ISBNs :

9781479922208

Database :

Complementary Index

Journal :

2014 IEEE Workshop On Microelectronics & Electron Devices (WMED)

Publication Type :

Conference

Accession number :

97035076

Full Text :

https://doi.org/10.1109/WMED.2014.6818721