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Resistive switching characteristics of polycrystalline SrTiO3 films.
- Source :
- Applied Physics Letters; 6/16/2014, Vol. 104 Issue 24, p1-4, 4p, 5 Graphs
- Publication Year :
- 2014
-
Abstract
- Strontium titanate (STO) thin films 90 nm in thickness were grown on a Pt substrate throughatomic layer deposition (ALD). The as-deposited ALD STO grown with an ALD cycle ratio of 1:1 (Sr:Ti) was in an amorphous phase, and annealing at 800 °C in air crystallized the films into the perovskite phase. This phase change was confirmed by x-ray diffraction and transmission electron microscopy. The as-deposited ALD STO exhibited no discernible switching mechanism, whereas unipolar switching behavior was reproducibly observed with a high resistance ratio (10<superscript>8</superscript>-10<superscript>9</superscript>) and strict separation of the set/reset voltages and currents in the annealed ALD STO. Mechanisms for charge transport in both the low- and high-resistance states and for resistive switching in the annealed ALD STO are also proposed. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 104
- Issue :
- 24
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 96713701
- Full Text :
- https://doi.org/10.1063/1.4883646