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Hard X-rays and soft-matter: processing of sol-gel films from a top down route.

Authors :
Innocenzi, Plinio
Malfatti, Luca
Marmiroli, Benedetta
Falcaro, Paolo
Source :
Journal of Sol-Gel Science & Technology; May2014, Vol. 70 Issue 2, p236-244, 9p
Publication Year :
2014

Abstract

A current trend of applied research in the field of nanomaterials is the integration of bottom up and top down fabrication methods. Sol-gel chemistry is widely applied to obtain different functional materials from a bottom up route, especially in the case of thin films. To fabricate devices based on sol-gel films, which include nanocomposites and mesoporous ordered materials, application of lithography technologies is mandatory. Among the different lithographic approaches, photolithography is widely used by companies using micro-fabrication processes. In this context, photolithography is a typical top down method that requires to be integrated as much as possible with deposition of thin films from a liquid phase. Recently we have developed a new integrated fabrication method which uses high energy photons, such as hard X-rays, which typically have energies between 2.5 and 12 keV, for the manipulation and production of a large variety of functional materials and devices. In the present review a short overview of such achievements is presented. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
09280707
Volume :
70
Issue :
2
Database :
Complementary Index
Journal :
Journal of Sol-Gel Science & Technology
Publication Type :
Academic Journal
Accession number :
95801075
Full Text :
https://doi.org/10.1007/s10971-013-3227-y