Design, analysis, and modelling of a MEMS capacitive microphone for integration into CMOS circuits.

Details

Language :

English

ISBNs :

9781479927517

Database :

Complementary Index

Journal :

2013 IEEE Asia Pacific Conference on Postgraduate Research in Microelectronics & Electronics (PrimeAsia)

Publication Type :

Conference

Accession number :

95075407

Full Text :

https://doi.org/10.1109/PrimeAsia.2013.6731202