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Large grain growth of Ge-rich Ge1-xSnx(x≈0.02) on insulating surfaces using pulsed laser annealing in flowing water.

Authors :
Masashi Kurosawa
Noriyuki Taoka
Hiroshi Ikenoue
Osamu Nakatsuka
Shigeaki Zaima
Source :
Applied Physics Letters; 2/10/2014, Vol. 104 Issue 6, p061901-1-061901-4, 4p, 1 Diagram, 3 Graphs
Publication Year :
2014

Abstract

We investigate Sn incorporation effects on the growth characteristics of Ge-rich Ge<subscript>1-x</subscript>Sn<subscript>x</subscript> (x<0.02) on SiO<subscript>2</subscript> crystallized by pulsed laser annealing (PLA) in air and water. Despite the very low Sn content of 2%, Sn atoms within the GeSn layers play a role in preventing ablation and aggregation of the layers during these PLA. Raman and electron backscatter diffraction measurements demonstrate achievement of large-grain (~800 nmϕ) growth of Ge<subscript>0.98</subscript>Sn<subscript>0.02</subscript> polycrystals by using PLA in water. These polycrystals also show a tensile-strain of ~0.68%. This result opens up the possibility for developing GeSn-based devices fabricated on flexible substrates as well as Si platforms. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
00036951
Volume :
104
Issue :
6
Database :
Complementary Index
Journal :
Applied Physics Letters
Publication Type :
Academic Journal
Accession number :
94477424
Full Text :
https://doi.org/10.1063/1.4864627