Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels (dimension measurement).

Details

Language :

English

ISSN :

00189456

Volume :

38

Issue :

2

Database :

Complementary Index

Journal :

IEEE Transactions on Instrumentation & Measurement

Publication Type :

Academic Journal

Accession number :

93176611

Full Text :

https://doi.org/10.1109/19.192345