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From substrate to VLSI: investigation of hardened SIMOX without epitaxy, for dose, dose rate and SEU phenomena.
- Source :
- IEEE Transactions on Nuclear Science; 1988, Vol. 35 Issue 6, p1355-1360, 6p
- Publication Year :
- 1988
Details
- Language :
- English
- ISSN :
- 00189499
- Volume :
- 35
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- IEEE Transactions on Nuclear Science
- Publication Type :
- Academic Journal
- Accession number :
- 93146727
- Full Text :
- https://doi.org/10.1109/23.25464