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Development of highly reliable Al-Si-Pd alloy interconnections for VLSI.
- Source :
- IEEE Transactions on Electron Devices; 1990, Vol. 37 Issue 4, p947-951, 5p
- Publication Year :
- 1990
Details
- Language :
- English
- ISSN :
- 00189383
- Volume :
- 37
- Issue :
- 4
- Database :
- Complementary Index
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- 93117608
- Full Text :
- https://doi.org/10.1109/16.52428