Influence of TEOS/Si3N4 passivation layer on the performance of MOSFET/ISFET structure.

Details

Language :

English

ISBNs :

9781479905522

Database :

Complementary Index

Journal :

2013 IEEE 4th Control & System Graduate Research Colloquium

Publication Type :

Conference

Accession number :

92935121

Full Text :

https://doi.org/10.1109/ICSGRC.2013.6653291