Photochemical polishing of sapphire substrate based on nonadiabatic optical near-field etching.

Details

Language :

English

ISBNs :

9781479915125

Database :

Complementary Index

Journal :

2013 International Conference on Optical MEMS & Nanophotonics (OMN)

Publication Type :

Conference

Accession number :

92918032

Full Text :

https://doi.org/10.1109/OMN.2013.6659089