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MEMS-based integrated head/actuator/slider for hard disk drives.

Authors :
Imamura, T.
Katayama, M.
Ikegawa, Y.
Ohwe, T.
Koishi, R.
Koshikawa, T.
Source :
IEEE/ASME Transactions on Mechatronics; 1998, Vol. 3 Issue 3, p166-174, 9p
Publication Year :
1998

Details

Language :
English
ISSN :
10834435
Volume :
3
Issue :
3
Database :
Complementary Index
Journal :
IEEE/ASME Transactions on Mechatronics
Publication Type :
Academic Journal
Accession number :
92824957
Full Text :
https://doi.org/10.1109/3516.712112